Atomic Layer Deposition (ALD) Reactor System

DEPT OF DEFENSE · DEPT OF THE NAVY · ONR · ONR NRL · NAVAL RESEARCH LABORATORY is soliciting Atomic Layer Deposition (ALD) Reactor System. Solicitation number N00173-26-Q-TB02. Classified under NAICS 334513 — Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables. Product/service code 6640 — LABORATORY EQUIPMENT AND SUPPLIES. Place of performance: DC, USA. Responses are due by 14 September 2026 21:00 UTC. Posted on SAM.gov, the US federal contract opportunities system; registration is required to bid.

COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued. Solicitation number N00173-26-Q-TB02 is issued as a  request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes. This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov. The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9. See solicitation attachment, below.