Germany – Laboratory, optical and precision equipments (excl. glasses) – Deposition Tool 8 Inch
Issued by Lehrstuhl für Technische Physik E23, TUM · via TED — Tenders Electronic Daily (EU)
- Published
- 25 Sept 2026
- Closes
- 5 Oct 2026, 23:59 UTC
- Reference
- 579224-2026
- Location
- Germany
- Sector
- Manufacturing & Supply
- Type
- goods
Details
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a UHV chamber for sputtering of superconductors, a UHV chamber for oxidation, a UHV chamber for Ar ion milling, and a flipping station. The system must allow metalizing both sides of the wafers in situ, with minimal backside particle contamination. The wafers should only be touched on the side (edge gripping).
Lots Lot 1 — Deposition Tool 8 Inch: siehe Leistungsbeschreibung.
Buyer: Lehrstuhl für Technische Physik E23, TUM
Buyer country: DEU
Procedure: open
CPV code: 38000000
Full notice, tender documents and how to bid are on the official TED page (link above).
Context for bidders
There are 550 open Manufacturing & Supply tenders in Germany. This one closes in 11 days.
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Documents
- TED-official-notice-579224-2026.pdfDownload (pdf)
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